What is Borofloat Glass?
Borofloat is a borosilicate glass known for its exceptional thermal stability, optical clarity, and chemical resistance. It is manufactured using the float glass process and is widely used in applications requiring high precision and durability.
Key Properties of Borofloat
- Low Thermal Expansion: Ensures stability under varying temperatures.
- High Thermal Resistance: Can withstand temperatures up to 450°C.
- Optical Transparency: Excellent transmittance in UV, visible, and IR ranges.
- Chemical Durability: Resistant to acids, bases, and solvents.
- Mechanical Strength: Scratch-resistant and structurally robust.
Applications of Borofloat in Semiconductors
1. Photolithography Masks
Borofloat's low thermal expansion and optical clarity make it ideal forphotolithography mask substratesused to create semiconductor circuits.
2. Wafer Carriers
Borofloat glass serves as stable wafer carriers during high-temperature semiconductor processing.
3. Thin-Film Substrates
It acts as a substrate for thin-film deposition processes, providing a smooth and stable surface.
4. MEMS Devices
In MEMS fabrication, Borofloat is used for micromachining and bonding due to its thermal and mechanical stability.
5. Microfluidic Devices
Borofloat is used as a substrate for microfluidics and lab-on-chip devices in bioelectronics and semiconductor research.
Comparison with Other Materials
| Property | Borofloat Glass | Quartz (Fused Silica) | Soda-Lime Glass |
|---|---|---|---|
| Thermal Expansion | Low | Very Low | High |
| Thermal Stability | High | Very High | Low |
| Optical Clarity | Excellent | Superior | Moderate |
| Chemical Resistance | High | Very High | Low |
| Cost | Moderate | High | Low |